[en] Low in degassing rate, carbon film produced by ECR plasma is expected to have good vacuum-engineering characteristics. In particular, it is hopeful as material for ultra-high vacuum equipment because water is not adsorbed significantly and, if adsorbed, can be desorbed easily. This suggests that equipment coated with carbon can achieve an ultra-high vacuum. Furthermore, carbon coating may make it possible to develop so-called room-temperature- pumped ultra-high vacuum equipment. In the study, the gas release characteristics of ultra-high vacuum equipment is simulated by a simple method based on degassing rate measurements. These measurements show that water is the major component of the released gas. The degassing rate decreases linearly with time. Thus, water vapor release characteristics can be determined from the time dependence of the pressure on the Freundrich-type adsorption isotherm. Simulation results indicate that vacuum equipment coated with carbon can achieve an ultra-high vacuum rapidly without baking. It is expected that surface with better vacuum-engineering characteristics would be obtained by improving the quality of film by optimizing the ECR plasma application conditions. (N.K.)