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AbstractAbstract
[en] In the present article, structure phase transformations in thin iron films successively irradiated by nitrogen and boron ions and then annealed in vacuum were investigated by transmission electron microscopy (TEM). As a result of the experiments, it was found that during successive implantation some types of phase composition Fe3B, Fe3B + ε-Fe2+x, ε-Fe2+xN or ε-Fe2+xN+FeB, depending on the irradiation nitrogen and boron doses, were formed. Successive implantation leads to an increase of the temperature range of the phase existence ε-Fe2+xN in comparison with single implantation by N+ ions from 450degC to 600degC. During annealing at more than 80degC boron phases FeB are transformed into Fe2B, and Fe3B phases at T>400degC are transformed into Fe2B. The change of the relative value of electrical resistance (R/R0) of Fe films after implantation and in the process of isochronal annealing is determined by structure and phase transformations. (orig.)
Primary Subject
Source
7. international conference on ion beam modification of materials (IBMM-7) and exposition; Knoxville, TN (United States); 9-14 Sep 1990
Record Type
Journal Article
Literature Type
Conference
Journal
Nuclear Instruments and Methods in Physics Research, Section B; ISSN 0168-583X;
; CODEN NIMBE; v. 59/60(pt.2); p. 751-756

Country of publication
AMORPHOUS STATE, ANNEALING, BORON IONS, CHEMICAL COMPOSITION, CRYSTAL DEFECTS, CRYSTALLIZATION, ELECTRIC CONDUCTIVITY, HIGH TEMPERATURE, ION IMPLANTATION, IRON, IRON ALLOYS, IRON BORIDES, IRON IONS, IRON NITRIDES, MEDIUM TEMPERATURE, MICROSTRUCTURE, NITROGEN IONS, PHASE TRANSFORMATIONS, PHYSICAL RADIATION EFFECTS, TEMPERATURE DEPENDENCE, THIN FILMS, TRANSMISSION ELECTRON MICROSCO
ALLOYS, BORIDES, BORON COMPOUNDS, CHARGED PARTICLES, CRYSTAL STRUCTURE, ELECTRICAL PROPERTIES, ELECTRON MICROSCOPY, ELEMENTS, FILMS, HEAT TREATMENTS, IONS, IRON COMPOUNDS, METALS, MICROSCOPY, NITRIDES, NITROGEN COMPOUNDS, PHYSICAL PROPERTIES, PNICTIDES, RADIATION EFFECTS, TRANSITION ELEMENT COMPOUNDS, TRANSITION ELEMENTS
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