Filters
Results 1 - 1 of 1
Results 1 - 1 of 1.
Search took: 0.022 seconds
Besmann, T.M.; Vahlas, C.
Proceedings of the eleventh international conference on chemical vapor deposition 19901990
Proceedings of the eleventh international conference on chemical vapor deposition 19901990
AbstractAbstract
[en] This paper presents a thermodynamic investigation of the YBa2Cu3O7-x phase deposited from organometallic precursors by chemical vapor deposition. It is based on the minimization of the Gibbs free energy of the Y-Ba-Cu-O-C-H-Ar chemical system. The results are presented in CVD diagrams that describe the influence of temperature, pressure, and initial gas composition on the formation of stable phases. In addition, the results of equilibrium calculations are compared to those of reported CVD experiments
Primary Subject
Source
Spear, K.E. (Pennsylvania State Univ., University Park, PA (United States)); Cullen, G.W. (David Sarnoff Research Center, Princeton, NJ (United States)); 735 p; 1990; p. 188-194; The Electrochemical Society; Pennington, NJ (United States); 11. international conference on chemical vapor deposition; Seattle, WA (United States); 14-19 Oct 1990; CONF-901088--; The Electrochemical Society, 10 South Main St., Pennington, NJ 08534 (USA)
Record Type
Book
Literature Type
Conference
Country of publication
Reference NumberReference Number
INIS VolumeINIS Volume
INIS IssueINIS Issue