[en] This paper reports on a controllable process developed for chemical vapor deposition of superconducting YBa₂Cu₃O_x. The process relies on feeding and transport of a finely ground powder mixture of Y, Ba, and Cu tetramethylheptanedionates into a CVD furnace. X-ray diffraction, scanning electron microscopy, analytical electron microscopy, resistance versus temperature, and critical current measurements have been used to characterize the films. The optimum processing parameters were determined using parametric studies involving temperature, pressure, reagent feed rate and composition, and coating time. Extensive c-axis orientation was observed using x-ray diffraction and transmission electron microscopy. The presence of impurity phases and substrate/coating interaction layers were observed. ₂Cu₃O_x coatings on MgO (100) single crystal substrates exhibited critical currents of 2 x 10 ⁴ A/cm² at 77 K, 0 Tesla, with critical temperatures (Resistance = 0) of 86 K. Deposition of the ₂Cu₃O_x materials onto several fibrous substrates has been achieved, and a continuous fiber coating furnace is in operation