[en] Successive growth of Ba-ferrite (BaM) layer on YBa₂Cu₃O_x (YBCO) layer has succeeded by using facing targets sputtering (FTS) method, which is suitable for preparing oxide films. BaM layer deposited on YBCO showed clear c-axis orientation of their crystallites normal to the film plane and they could be grown successively without interdiffusion. These bilayered films showed apparent perpendicular magnetic anisotropy originated from BaM layer. Preferred c-axis orientation in BaM layer could be clearly observed when its thickness was as small as 300 A