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[en] The evaporation behaviour of Ba(thd)2 in a CVD-process for HTc-Super-conductors is presented. The long-time stability as well as possibilities to increase the evaporation rates by changing the geometry of the evaporator and the process conditions are discussed. 13 refs., 9 figs
Journal
Journal de Physique 4. Colloque; ISSN 1155-4339; 
; v. 1(c2); p. C2.713-C2.720
; v. 1(c2); p. C2.713-C2.720