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[en] Possibility of niobium and tantalum carbide deposition from gaseous phase with theoretical yield above 0.5 even at 1000 K is shown. The effect of process parameters on gas phase composition and theoretical yield of condensed phases is ascertained. The main components of gas phase under the studied conditions are HCl, H2, Cl, MCl3, MCl4, MCl5. Conditions under which the deposition contains carbide phases without free carbon are determined
Journal
Izvestiya Akademii Nauk SSSR, Neorganicheskie Materialy; ISSN 0002-337X; 
; CODEN IVNMA; v. 26(7); p. 1446-1449
; CODEN IVNMA; v. 26(7); p. 1446-1449