Investigation of the tunnel barrier in Nb-based junctions prepared by sputtering and electron beam evaporation

Kohlstedt, H.; Gundlach, K.H.; Schneider, A.

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Investigation of the tunnel barrier in Nb-based junctions prepared by sputtering and electron beam evaporation

Kohlstedt, H.; Gundlach, K.H.; Schneider, A.1991

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AbstractAbstract

[en] In this paper Nb-based tunnel junctions prepared by dc magnetron sputtering and electron beam evaporation are compared. Tunnel barriers consisting of Nb oxide, Al oxide and Si oxide are analyzed by anodization, Auger electron and inelastic electron tunneling spectroscopy

Primary Subject

CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY (G6412)

Secondary Subject

MATERIALS SCIENCE (B2320), INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY (B1110)

Source

1990 applied superconductivity conference; Snowmass, CO (United States); 24-28 Sep 1990; CONF-900944--

Record Type

Journal Article

Literature Type

Conference

Journal

IEEE Transactions on Magnetics; ISSN 0018-9464;

; CODEN IEMGA; v. 27(2); p. 3149-3152

Country of publication

United States

Descriptors (DEI)

ALUMINIUM OXIDES, ANODIZATION, AUGER ELECTRON SPECTROSCOPY, DIFFUSION BARRIERS, ELECTRON BEAMS, FABRICATION, INELASTIC SCATTERING, MAGNETRONS, MICROSTRUCTURE, NIOBIUM OXIDES, SILICON OXIDES, SPUTTERING, SUPERCONDUCTING JUNCTIONS, SUPERCONDUCTIVITY, TUNNEL EFFECT

Reference NumberReference Number

23020903

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