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AbstractAbstract
[en] This paper reports on a four-stage shift register fabricated using Nb/Al-Al2O3/Nb Josephson junctions, Mo resistors, Nb transmission lines, and SiO2 insulating layers. The circuit had 36 junctions (5 μm, 1000 A/cm3) and 61 resistors (1.2 ohms/square), with a minimum feature size of 2 μm. An eight-mask process was used in the fabrication. All material layers were deposited by sputtering. Patterning for all but one of the masking levels was done by lift-off using image reversal lithography in most cases. Lift-off avoided many of the problems common to reactive ion etching (RIE), including the need for etch stops, non-uniformity in etching, and the formation of organic residue (polymer) on the wafer
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Source
1990 applied superconductivity conference; Snowmass, CO (United States); 24-28 Sep 1990; CONF-900944--
Record Type
Journal Article
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Conference
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