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AbstractAbstract
[en] Backscattering of 20-3000 eV protons and 0.5-10 keV argon ions from surfaces with regular microrelief was investigated by computer simulation. One- and two-dimensional regular reliefs were constructed by the systems of parallel ridges and tightly packed pyramides, respectively. The particle reflection coefficient RN was evaluated for different roughness heights h = 0 ... 1000 A and roughness face inclinations ψb = 0 ... 85deg. The shape of RN dependences on ion energy was more sensitive to the roughness geometry for protons that for argon ions. The difference between the results for one- and two-dimentional reliefs was shown to be small at other equal conditions
Original Title
Modelirovanie otrazheniya protonov i ionov argona ot rel'efnoj poverkhnosti
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Journal Article
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