[en] Influence of deposition regime and substrate material on superconductive properties of YBa₂Cu₃O₇ films obtained by method of intercrossed laser beams is studied. Dependences of critical temperature of superconducting transition on deposition rate and substrate temperature are obtained; method of oxygen ionization in the process of film deposition is suggested. Method for obtaining films homogeneous by chemical composition on large-size substrates using laser operation in the mode of controlled desynchronization is developed