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Coon, S.R.; Calaway, W.F.; Pellin, M.J.
Argonne National Lab., IL (United States). Funding organisation: USDOE, Washington, DC (United States)1993
Argonne National Lab., IL (United States). Funding organisation: USDOE, Washington, DC (United States)1993
AbstractAbstract
[en] The sputtering of neutral metal clusters was investigated by measuring relative sputtering yields of copper clusters ejected from polycrystalline copper under 3.9 keV bombardment by Ne+, Ar+ and Xe+ ions at normal incidence. Yields of clusters from Ne+ bombardment were lower than those from Ar+ bombardment, were lower than from Xe+ bombardment. Sputtering yield ratios Ne+/Ar+ and Xe+/Ar+ were 0.56 and 1.08. Size distribution of sputtered clusters can be fit by a power law dependence with exponents of -8.1, -8.2 and -6.2 for Ne+, Ar+ and Xe+, respectively. The similarity of the exponents of the Ne+ and Ar+ power law fits indicates that the sputtering yields for these two primary ions are similar while that for Xe+ is substantially higher, in contrast to the sputtering yield ratio data. The difference between the two measurements can be explained by assuming a systematic uncertainty in the sputtering yield ratio measurements that makes the measured ratios lower than the true values. Assuming a value at the high end of the experimental Ne+ sputtering yield range, the exponents of the power law fits exhibit a linear dependence on the total sputtering yield
Source
1993; 15 p; ICACS: 15. international conference on atomic collision in solids; London (Canada); 26-30 Jul 1993; CONF-930712--3; CONTRACT W-31109-ENG-38; Available from OSTI as DE93019010; NTIS; INIS; US Govt. Printing Office Dep
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