Filters
Results 1 - 1 of 1
Results 1 - 1 of 1.
Search took: 0.016 seconds
Rej, D.J.; Wood, B.P.; Faehl, R.J.; Fleischmann, H.H.
Los Alamos National Lab., NM (United States). Funding organisation: USDOE, Washington, DC (United States)1993
Los Alamos National Lab., NM (United States). Funding organisation: USDOE, Washington, DC (United States)1993
AbstractAbstract
[en] The uncontrolled loss of accelerated secondary electrons in plasma source ion implantation (PSII) can significantly reduce system efficiency and poses a potential x-ray hazard. This loss might be reduced by a magnetic field applied near the workpiece. The concept of magnetically-insulated PSII is proposed, in which secondary electrons are trapped to form a virtual cathode layer near the workpiece surface where the local electric field is essentially eliminated. Subsequent electrons that are emitted can then be reabsorbed by the workpiece. Estimates of anomalous electron transport from microinstabilities are made. Insight into the process is gained with multi-dimensional particle-in-cell simulations
Primary Subject
Source
1993; 18 p; Workshop on plasma-based ion implantation; Madison, WI (United States); 4-6 Aug 1993; CONF-9308156--1; CONTRACT W-7405-ENG-36; Available from OSTI as DE93040106; NTIS; US Govt. Printing Office Dep
Record Type
Report
Literature Type
Conference
Report Number
Country of publication
Reference NumberReference Number
INIS VolumeINIS Volume
INIS IssueINIS Issue