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AbstractAbstract
[en] A series of gettering experiments has been carried out with a view to obtaining a better understanding of the gettering mechanism of Au atoms in silicon. Neutron activation techniques were used to study the yield of ion-implantation gettering of gold in gold-equilibrated silicon samples. The implantation species was bombarded by 100 keV neon ions to the doses 5 x 1015, 1016 and 5 x 1016 ions cm-2. Next, annealing at temperatures 600oC, 800oC and 1000oC, respectively was performed. The experimental results of gettering yield Gexp were compared with theoretical values Gthe. In this paper we propose a gettering model based on the dissociative mechanism of diffusion. We suggest that, for temperatures up to about 900oC, the predominant gettering of Au atoms is government by this mechanism. (Author)
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