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Kubiak, G.D.; Krenz, K.D.; Berger, K.W.; Trucano, T.G.; Fisher, P.W.; Gouge, M.J.
Sandia National Labs., Livermore, CA (United States). Funding organisation: USDOE, Washington, DC (United States)1994
Sandia National Labs., Livermore, CA (United States). Funding organisation: USDOE, Washington, DC (United States)1994
AbstractAbstract
[en] We have developed a new laser plasma cryogenic target scheme that achieves high conversion efficiency (CE), but produces no condensable target debris and low vaporized target gas loads. This scheme employs a solidified pellet of a rare gas, such as Xe, which is irradiated in free flight by a focused drive laser. The pellet is made small enough that gas loads produced following target vaporization are manageable, but large enough to fully intercept the laser energy at its focus. To assess the fundamental utility of cryogenic pellet targets, we have examined the conversion efficiency, extreme ultraviolet (EUV) spectroscopy, and fragmentation dynamics of Xe pellets irradiated with a 248 mn KrF laser
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1994; 8 p; Optical Society of America conference on extreme ultraviolet lithography; Monterey, CA (United States); 19-21 Sep 1994; CONF-9409177--3; CONTRACT AC04-94AL85000; Also available from OSTI as DE95002488; NTIS; US Govt. Printing Office Dep
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