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Yamamura, Yasunori; Tawara, Hiro.
National Inst. for Fusion Science, Nagoya (Japan)1995
National Inst. for Fusion Science, Nagoya (Japan)1995
AbstractAbstract
[en] The yields of the ion-induced sputtering from monoatomic solids at normal incidence for various ion-target combinations are presented graphically as a function of the incident ion energy. In order to fill the lack of the experimental data, the sputtering yields are also calculated by the Monte Carlo simulation code ACAT for some ion-target combinations. Each graph shows available experimental data points and the ACAT data, together with the sputtering yields calculated by the present empirical formula, whose parameters are determined by the best-fit to available data. (author)
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Mar 1995; 115 p
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Report
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Numerical Data
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