[en] Hafnia-silica multilayer polarizers were deposited by e-beam evaporation onto BK7 glass substrates. The polarizers were designed to operate at 1064 nm at Brewster's angle (56 degree). They were tested with a 3-ns laser pulse at 45, 56, and 65 degree incidence angle in order to vary the electric field distribution in the multilayer, study their effects on damage morphology, and investigate possible advantages of off-use angle laser conditioning. Morphology of the laser-induced damage was characterized by optical and scanning electron microscopy. Four distinct damage morphologies (pit, flat bottom pit, scald, outer layer delamination) were observed; they depend strongly on incident angle of the laser beam. Massive delamination observed at 45 and 56 degree incidence, did not occur at 65 degree; instead, large and deep pits were found at 65 degree. Electric field distribution, temperature rise, and change in stress in the multilayer were calculated to attempt to better understand the relation between damage morphology, electric field peak locations, and maximum thermal stress gradients. The calculations showed a twofold increase in stress change in the hafnia top layers depending on incident angle. Stress gradient in the first hafnia-silica interface was found to be highest for 45, 56, and 65 degree, respectively. Finally, the maximum stress was deeper in the multilayer at 65 degree. Although the limitations of such simple thermal mechanical model are obvious, the results can explain that outer layer delamination is more likely at 45 and 56 degree than 65 degree and that damage sites are expected to be deeper at 65 degree