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De Kerckhove, D.G.; Wilkinson, A.J.; Grime, G.W.; Breese, M.B.H.
10th Australian conference on nuclear techniques of analysis. Proceedings1998
10th Australian conference on nuclear techniques of analysis. Proceedings1998
AbstractAbstract
[en] Beam rocking is a new technique in nuclear microscopy which has been developed at the Oxford nuclear microprobe to produce angle-resolved channelling information from small areas of crystalline material without any rotation or translation of the sample. A beam rocking system with a focused 3 MeV proton beam has been used to detect and quantify small interface rotation angles in strained Si1xGex/Si samples with 0.015< x<0.200, where the sample has been selectively etched to expose the underlying substrate. By eliminating possible rotation errors due to translation of the sample stage or backlash in the gears of a goniometer, small rotation angles have been measured, and these are found to be in good agreement with electron back scatter diffraction (EBSD) results.(authors)
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Australian Institute of Nuclear Science and Engineering, Lucas Heights, NSW (Australia). Funding organisation: Australian Institute of Nuclear Science and Engineering, Lucas Heights, NSW (Australia); Vacuum Society of Australia (Australia); Australian National Univ., Canberra, ACT (Australia); 244 p; 1998; p. 126-128; 10. Australian conference on nuclear techniques of analysis; Canberra, ACT (Australia); 24-26 Nov 1997; Extended abstract. 8 refs., 4 figs.
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Miscellaneous
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Conference; Numerical Data
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