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El Bouanani, M.; Johnston, P.N.; Bubb, I.F.; Jarosch, P.; Short, R.C.
10th Australian conference on nuclear techniques of analysis. Proceedings1998
10th Australian conference on nuclear techniques of analysis. Proceedings1998
AbstractAbstract
[en] Elastic Recoil Detection Analysis (ERDA) is a powerful technique for depth profiling analysis of H in thin films and near the surface of materials. The use of He incident ions with a stopping filter and a Si energy detector is the usual analytical methodology because (i) ion beam induced H diffusion is less under He ion irradiation than with heavy ions and (ii) the detection efficiency is 100 %. However, the depth resolution deteriorates due to the straggling in the stopping filter. A nuclear charge dispersive detection method based on the use of ΔE-E silicon telescope with ΔE thickness of 4 μm with enhanced depth resolution and accessible depth is proposed. The gains in depth resolution and analysable depth are demonstrated. Normalisation based on the forward scattered He spectrum is used to offset the uncertainties resulting from the H loss during irradiation of Kapton and Mylar standards. The new technique described is based on simultaneous detection of both the recoiled H and forward scattered He using a silicon ΔE-E telescope. This improves significantly the depth resolution and eliminate the need for standards for quantitative depth profiling. A new analysis approach for internal normalization is also described
Source
Australian Institute of Nuclear Science and Engineering, Lucas Heights, NSW (Australia). Funding organisation: Australian Institute of Nuclear Science and Engineering, Lucas Heights, NSW (Australia); Vacuum Society of Australia (Australia); Australian National Univ., Canberra, ACT (Australia); 244 p; 1998; p. 133-135; 10. Australian conference on nuclear techniques of analysis; Canberra, ACT (Australia); 24-26 Nov 1997; Extended abstract. 16 refs., 2 figs.
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Miscellaneous
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Conference; Numerical Data
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