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AbstractAbstract
[en] The method for excitation of a plasma comprises the step of subjecting a gas to an electric field generated by an electrode system. Each of 3 to 30 electrodes are connected to one of three specified AC voltages. The frequency is preferably between 50 and 60 Hz. The invention also concerns an electrode system for carrying out the method. 3 figs
Original Title
Fremgangsmaate og elektrodesystem for eksitering av et plasma
Primary Subject
Source
12 Jan 1998; 2 May 1995; 15 p; NO PATENT DOCUMENT 302060/B1/; NO PATENT APPLICATION 951682; Application date: 2 May 1995
Record Type
Patent
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