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Escobar A, L.; Haro P, E.; Camacho L, M.A.; Fernandez G, M.; Jimenez J, J.; Sanchez P, A.
Academia Mexicana de Ciencia de Materiales A.C. (Mexico)1998
Academia Mexicana de Ciencia de Materiales A.C. (Mexico)1998
AbstractAbstract
[en] The thin films of TiO2 have been investigated extensively in the last years, since they have a broad variety of applications, which owing to their less usual chemical, electrical and optical properties. In this work are presented the obtained results to deposit TiO2 thin films over glass substrates utilizing the Laser ablation technique. It has been deposited thin films at different substrate temperatures and different oxygen pressures, with the purpose to study the influence of these deposit parameters in the structural characteristics of the obtained films. The structural characterization was realized through Raman spectroscopy and X-ray diffraction (XRD), the superficial morphology was verified by Scanning Electron Microscopy (SEM). The results show that the obtained films were TiO2 in rutile phase, getting this with the substrates at low temperature, its morphology shows a soft surface with some sprinkling particles and a good adherence. (Author)
Original Title
Obtencion de peliculas delgadas de TiO2 por ablacion laser
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1998; 1 p; International Materials Research Congress; Cancun, Quintana Roo (Mexico); 3. NACE Latin American Region Corrosion Congress; 3. NACE Congreso Latinoamericano de Corrosion y el 6. Congreso Iberoamericano de Corrosion y Proteccion; Cancun (Mexico); 31 Aug - 3 Sep 1998; 6. Iberoamerican Congress of Corrosion and Protection; 3. NACE Congreso Latinoamericano de Corrosion y el 6. Congreso Iberoamericano de Corrosion y Proteccion; Cancun (Mexico); 31 Aug - 3 Sep 1998
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