[en] In the present paper the possibilities of research of the multilayer polarizing neutron monochromators by non-destructive nuclear techniques are considered. It was shown that five Ni isotopes in a single-layer mirror have an influence on the shape on the Rutherford backscattering spectrum. The carbon and oxygen content was determined in Ni layer by using ¹²C(p, p) ¹²C and ¹⁶O (⁴He, ⁴He) ¹⁶O nuclear reaction techniques. The element depth profiles of all major elements and impurities based on the FeCo/TiZr layer with the TiZrGd substrate deposited on glass were obtained. The surface roughness was estimated for the multilayer structure using the same experimental spectra. These results were used to improve the technology of preparation of the multilayer structures with better polarizing characteristics. (author)