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Lund, T.; Rayner, J.P.; French, G.N.; Cheetham, A.D.; Daly, M.; Langer, M.
The 22nd AINSE plasma science and technology conference. Conference handbook1999
The 22nd AINSE plasma science and technology conference. Conference handbook1999
AbstractAbstract
[en] This poster describes the design and operation of an automatic matching network for a Helicon plasma source. The driving point impedance of an antenna used to couple RF power into a Helicon plasma source has a typical resistance of a few ohms and a significant inductive reactance. A matching network is therefore required to match an RF generator with its output impedance of 50 Ohms to the antenna. If the matching network is correctly adjusted the forward power to the plasma is maximised while minimising the power reflected back to the generator
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Australian Institute of Nuclear Science and Engineering, Lucas Heights, NSW (Australia); 133 p; 1999; p. 115-116; 22. AINSE plasma science and technology conference. Plasma'99; Canberra (Australia); 8-9 Feb 1999; Extended abstract. 2 refs., 2 figs.
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