[en] Elastic Recoil Detection using heavy ion projectile beams allows compositional depth-profiling of materials to a depth of about 2.5 μm. The technique is sensitive to all chemical elements including hydrogen. It is particularly suited for the analysis of thin film materials. Large solid-angle position-sensitive gas ionization detectors have been developed for the efficient detection of the recoil ions. With the set-up at the Australian National University, measurement and analysis are greatly simplified by using a new detector design. A grid electrode allows a direct determination of the ion energy, while a divided anode enables the simultaneous detection of ions with largely different atomic numbers and also provides linear position information. A diverse spectrum of materials has been analyzed including photosensitive doped silica, high-T_c superconductors and dielectric films