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Darmstadt University of Technology (Germany); Wroclaw University of Technology (Poland); GMM-VDE/VDI Gesellschaft Mikroelektronik (Germany); Mikro- und Feinwerktechnik Frankfurt (Germany); ITG - Informationstechnische Gesellschaft im Verband der Elektrotechnik Elektronik (Germany); Informationstechnik c.V. Frankfurt, FRG (Germany); 163 p; ISBN 83-7085-422-2; 
; 1999; p. 138-139; 2. International Workshop on Vacuum Microelectronics; Wroclaw (Poland); 11-13 Jul 1999; Available at Institute of Electronic Materials Technology, Wolczynska 133, 01-919 Warsaw (PL); 3 refs, 3 figs
; 1999; p. 138-139; 2. International Workshop on Vacuum Microelectronics; Wroclaw (Poland); 11-13 Jul 1999; Available at Institute of Electronic Materials Technology, Wolczynska 133, 01-919 Warsaw (PL); 3 refs, 3 figs