[en] An analysis of principle of a biased Faraday cup for measuring ion beams density and the main reasons related to the measuring accuracy were presented. An array of mini biased collimated Faraday cups was manufactured for the measurement of ion beam density of a compact 200 keV high power ion beam source. In the experiments the maximum density of ion beam was in the center of the beam, and it was about 170 A/cm2