[en] This study aims at general elucidation of atom level composition variation due to radiation damage and property change accompanied with this under intending to stressing application of the in-situ analysis and evaluation apparatus on material radiation damage. Then, by using the electron energy loss spectroscopy (EELS) capable of showing a power in composition analysis at microscopic region, measurement of EELS on crystal structure change after heat treatment of Xe precipitation was carried out under parallel of its high resolution observation. As a result, a precipitation with less than 30 nm in diameter was observed on a specimen inserted at 473 K. Xe precipitates in crystalline state began to change at 623 K, to be perfectly gassy state at 773 K. In an energy filter image (EFI) using low loss of Xe, distribution of crystalline and non-crystalline Xe was observed. In EELS, peaks at 14.6 and 15.3 eV were observed in 300 and 773 K, respectively, which were thought to be plasmon. And, difference of peak position at the core loss was thought to reflex difference of Xe state at 300 and 773 K. (G.K.)