[en] This study mainly aims at establishment on a new technical foundation to analyze dynamics on chemical reactions and lattice defects at material surface by focussing at timely change of the material under radiation (of ion beam, plasma, molecular beam, laser beam, and so on), under concept of evaluation on effect of a high speed process on the material property. Here were reported some main results on this study for the last five years. On study of vibratory spectroscopy at defect formation process, a basic technology directly to observe lattice vibration through time region was developed and confirmed first through some experiments to be usable for defect evaluation of ionic radiated materials. On dynamic study on surface reaction, a (resonance) multi-photon ionization apparatus was developed for testing molecular motion states formed and removed by chemical reaction at surface, by using which a study on dynamics on reactions between molecular ray and atomic ray and solid surfaces. And, on analysis and evaluation on surface property, a method for in-situ determination of threshold in neon plasma erosion of tungsten due to real time polarized analysis was proposed under collaboration with crossover invited researcher at SNL. The multi-photon ionization apparatus was also applied to a study on oxidation reactivity of carbon at micro cluster formation and ablation. And, films of CN series materials focussed for a new crystal phase were also made experimentally. (G.K.)