Filters
Results 1 - 1 of 1
Results 1 - 1 of 1.
Search took: 0.015 seconds
Dobler, M.; Jung, M.; Greithanner, S.
8. conference on total reflection x-ray fluorescence analysis and related methods2000
8. conference on total reflection x-ray fluorescence analysis and related methods2000
AbstractAbstract
[en] Responding to the latest demands in semiconductor process technology, ATOMIKA Instruments has developed a new TXRF surface analyzer generation TXRF 8300/8200W for wafer sizes up to 300 mm. This new tool set provides extended automation features for routine measurements in daily quality control as for unconventional demands in scientific work. The efficiency of the systems is illustrated and compared to the older TXRF 8030W generation. Measurement results gained on usual contaminated wafer surfaces as well as on new semiconductor material substrates are presented and prove the advantages of the improvements and novelties. The possibility to perform an analytical study at thin layers to determine layer thickness and density is demonstrated. A summary of the newest measurement results using these instruments and an outlook for further developments is given. (author)
Primary Subject
Source
Wobrauschek, P. (ed.) (Atominstitut, Stadionallee 2, 1020 Vienna (Austria)); Atominstitut der oesterreichischen Universitaeten, Technische Universitaet Wien, Stadionallee 2, 1020 Vienna (Austria). Funding organisation: Amptek Inc. 6, De Angelo Drive, Bedford (United States); Atomika, Atomika Instruments GmbH, Bruckmannring 40, D-85764 Oberschleissheim (Germany); Brau AG (Austria); Coca-Cola Beverages Austria (Austria); Creditanstalt (Austria); Intax, Schwarzschildstrasse 10, D-1248 Ital Structures (Germany); Pfeiffer Vacuum Austria, Diefenbachgasse 35, A-1150 Wien (Austria); Philips Analytical, Lelyweg 1, 7602 EA Almelo (Netherlands); Stadt Wien, Vienna (Austria); Technos (Japan); TU Wien, Vienna (Austria); et al; 108 p; 2000; p. 41; 8. conference on total reflection x-ray fluorescence analysis and related methods; Vienna (Austria); 25-29 Sep 2000; Available in abstract form only, full text entered in this record. Also available from Atominstitut der oesterreichischen Universitaeten, Technische Universitaet Wien, Stadionallee 2, 1020 Vienna (AT). e-mail: wobi@ati.ac.at
Record Type
Miscellaneous
Literature Type
Conference
Country of publication
Reference NumberReference Number
Related RecordRelated Record
INIS VolumeINIS Volume
INIS IssueINIS Issue