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AbstractAbstract
[en] A simple analytic model describing nonlocal (anomalous) electron heating in inductively coupled plasmas (ICPs) is developed. The model takes into account both collisionless (nonlocal) and collisional effects, and is thus valid for all collisionality regimes. The spatial profile of power absorption and the total power absorption of the wave are found. It is shown that the regions of the negative power absorption exist even with a given exponential profile of the electric field in plasma. The results of our simple model are in qualitative agreement with more rigorous self-consistent calculations and with experimental data
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S0963-0252(02)35506-3; Available online at http://stacks.iop.org/0963-0252/11/203/ps2212.pdf or at the Web site for the journal Plasma Sources Science and Technology (ISSN 1361-6595) http://www.iop.org/; Country of input: International Atomic Energy Agency (IAEA)
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Journal Article
Journal
Plasma Sources Science and Technology; ISSN 0963-0252;
; v. 11(2); p. 203-207

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