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Hubicka, Z; Cada, M; SIcha, M; Churpita, A; Pokorny, P; Soukup, L; JastrabIk, L
Department of Electronics and Vacuum Physics, Faculty of Mathematics and Physics, Charles University, V Holesovickach 2, 180 00 Prague 8 (Czech Republic); Institute for Problems of Materials Science, NASc of Ukraine, Krjijanovskogo 3, 03142 Kiev (Ukraine)2002
Department of Electronics and Vacuum Physics, Faculty of Mathematics and Physics, Charles University, V Holesovickach 2, 180 00 Prague 8 (Czech Republic); Institute for Problems of Materials Science, NASc of Ukraine, Krjijanovskogo 3, 03142 Kiev (Ukraine)2002
AbstractAbstract
[en] The description and investigation of a new atmospheric plasma source for the treatment and coatings of surfaces are presented in this paper. This new system is a modification of a well-known atmospheric torch discharge stabilized by a flowing channel of the working gas through an RF powered nozzle. The new version of this source prevents the transition to the regime with hot electrodes. This modification is suitable for surface and coatings applications of such substrates sensitive to overheating causing undesirable phase transition or melting. The new source called in our paper as an RF barrier-torch atmospheric discharge employs dielectrically coated nozzles instead of bare metallic ones. In that case, the plasma jet has quite different properties, as it is clear from presented experiments. The new version allowed excitation of the atmospheric plasma channel interacting with the substrate independently on the conductivity of the substrate. Simultaneously it is possible to hold the substrate temperature under atmospheric jet interaction below the limit point of aluminium melting or below an even lower limit of 80 deg. C in a pulse-modulated mode. Extension to the multi-nozzle barrier-torch system was attained with the application of nine quartz nozzles. This multi-plasma jet excitation and its interaction was demonstrated with the substrate made of either quartz or aluminium plate, both possibly with non-flat shape. Emission spectroscopy and RF voltage and current amplitude measurements were employed in order to characterize the RF barrier-torch discharge
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S0963-0252(02)34908-9; Available online at http://stacks.iop.org/0963-0252/11/195/ps2211.pdf or at the Web site for the journal Plasma Sources Science and Technology (ISSN 1361-6595) http://www.iop.org/; Country of input: International Atomic Energy Agency (IAEA)
Record Type
Journal Article
Journal
Plasma Sources Science and Technology; ISSN 0963-0252;
; v. 11(2); p. 195-202

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