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AbstractAbstract
[en] This paper describes the developments of laser Thomson scattering (LTS) for measuring electron density and temperature, or more generally electron energy distribution function (eedf) in glow discharge plasmas with electron densities below 1018 m-3. A brief description of the method for overcoming the sparcity of scattered photons by data accumulation techniques is followed by examples of applications, conducted at the authors' laboratory, to the measurement of the shape of the eedf and temperature anisotropy in various discharges including reactive plasmas, and some as close as 100 μm from a material surface. Measurements of the latter sort should permit the elucidation of micro-discharges and electrode effects such as cathode fall phenomena in particular
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Source
25. international conference on phenomena in ionized gases; Nagoya (Japan); 17-22 Jul 2001; S0963-0252(02)36844-0; Available online at http://stacks.iop.org/0963-0252/11/A143/ps2c21.pdf or at the Web site for the journal Plasma Sources Science and Technology (ISSN 1361-6595) http://www.iop.org/; Country of input: International Atomic Energy Agency (IAEA)
Record Type
Journal Article
Literature Type
Conference
Journal
Plasma Sources Science and Technology; ISSN 0963-0252;
; v. 11(3A); p. A143-A149

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