[en] Quantum efficiencies (QE) in the vacuum ultraviolet (VUV) wavelength region have been measured for solid CsI layers on various substrates. The CsI films were deposited applying electron beam evaporation. The QE measurements were performed utilizing synchrotron radiation as well as light from a deuterium lamp. A GaAsP diode with a sensitivity calibration traceable to a primary radiation standard was used for normalization. For CsI layers grown on resin-stabilized graphite films a significant enhancement of QE was observed. Substrates suitable for gas detector applications and aging properties were investigated. The procedures to prepare and reproduce high quantum efficient CsI layers are described