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[en] An UHV box coater was set up for the deposition of highly reflective layers in the vacuum ultraviolet (VUV) wavelength range on large-area mirror substrates. The VUV mirrors are needed for the ring imaging Cherenkov (RICH) detector of the high-acceptance di-electron spectrometer (HADES). The complete dry vacuum system is described. The spatial deposition distribution from the evaporation sources was measured. The reflectivity of the Al mirror layer was optimized for the wavelength range of 145-210 nm by varying the thickness of the MgF2 protective layer. The setup for measuring the reflectivity in the VUV range is described and reflectivity data are presented
Journal
Nuclear Instruments and Methods in Physics Research. Section A, Accelerators, Spectrometers, Detectors and Associated Equipment; ISSN 0168-9002; 
; CODEN NIMAER; v. 438(1); p. 152-162
; CODEN NIMAER; v. 438(1); p. 152-162