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AbstractAbstract
[en] The evolution of the electron energy distribution function (EEDF) against pressure is investigated in the capacitive mode of inductively coupled plasma (ICP). A significant change in the EEDFs is observed: a bi-Maxwellian EEDF at low pressure (≤10 mTorr) evolves into a Druyvestein-like EEDF at high pressure (≥50 mTorr) in the capacitive mode (low-density mode) while the EEDFs in the inductive mode (high-density mode) does not evolve like in the capacitive mode due to high electron-electron collisions. This EEDF transition in the capacitive mode of ICP is similar to that in the capacitive coupled plasma (CCP) reported in literature [V. A. Godyak and R. B. Piejak, Phys. Rev. Lett. 65, 996(1990)] as pressure increases. This observation directly shows that the electron heating mechanism of the capacitive mode in the ICP is the same as that in the CCP, as expected
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(c) 2002 American Institute of Physics.; Country of input: International Atomic Energy Agency (IAEA)
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Journal Article
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