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Macek, M.; Cekada, M.; Kek, D.; Panjan, P.
12. International conference on thin films (ICTF 12). Book of Abstract2002
12. International conference on thin films (ICTF 12). Book of Abstract2002
AbstractAbstract
[en] Mechanical properties, microstructure and the average chemical composition of Cr(C,N) hard coatings deposited in Ar-C2H2-N2 plasma strongly depends on the partial pressure of the reactive gases (N2, C2H2) and on the type of the deposition equipment. In this study we report on the properties of Cr(C,N) hard coatings deposited by means of the triode ion plating in the BAI 730 apparatus and those prepared by sputter deposition in Balzers Sputron in the pressure range from 0.12 Pa (pure Ar) up to 0.35 Pa with different ratios (0-100%) between C2H2 and N2. At first mechanical properties (microhardness and adhesion) of coatings were analyzed on the common way. Internal stress was measured by the radius of substrate curvature. Chemical composition of coatings was analyzed by means of AES while the Raman and XPS spectroscopy was used to determined the nature of carbon bonding in the Cr(C,N) films. Microstructure was determined by XRD as well as by means of TEM and TED. Chemical state of various elements in the coating has been studied by XPS. The ratio of the carbide bond (C-Cr) against the C-C and C-H bonds was calculated. The existence of the graphite phase in some Cr(C,N) coatings was confirmed by Raman spectroscopy. (Authors)
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Source
Majkova, E. (ed.); Stefan Luby, S. (ed.) (Slovak Academy of Sciences, Bratislava (Slovakia)); Slovak Vacuum Society, Bratislava (Slovakia); Slovak Academy of Sciences, Bratislava (Slovakia); Slovak University of Technology, Bratislava (Slovakia); Czech Vacuum Society, Prague (Czech Republic); 182 p; Sep 2002; 1 p; 12. International conference on thin films; Bratislava (Slovakia); 15-20 Sep 2002; Also available from VEDA, Publishing House of Slovak Academy of Sciences, Bratislava, Slovak Republic; p. TF5.6.P
Record Type
Miscellaneous
Literature Type
Conference; Numerical Data
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CHEMICAL VAPOR DEPOSITION, CHROMIUM CARBIDES, CHROMIUM NITRIDES, CRYSTALLOGRAPHY, ETHYLENE, EXPERIMENTAL DATA, INHOMOGENEOUS FIELDS, MICROSTRUCTURE, NITROGEN, NITROGEN IONS, PLASMA ARC SPRAYING, RAMAN SPECTROSCOPY, SOLIDS, SPUTTERING, THIN FILMS, TRANSMISSION ELECTRON MICROSCOPY, VAPOR DEPOSITED COATINGS, X-RAY DIFFRACTION, X-RAY PHOTOELECTRON SPECTROSCOPY
ALKENES, CARBIDES, CARBON COMPOUNDS, CHARGED PARTICLES, CHEMICAL COATING, CHROMIUM COMPOUNDS, COATINGS, COHERENT SCATTERING, DATA, DEPOSITION, DIFFRACTION, ELECTRON MICROSCOPY, ELECTRON SPECTROSCOPY, ELEMENTS, FILMS, HYDROCARBONS, INFORMATION, IONS, LASER SPECTROSCOPY, MICROSCOPY, NITRIDES, NITROGEN COMPOUNDS, NONMETALS, NUMERICAL DATA, ORGANIC COMPOUNDS, PHOTOELECTRON SPECTROSCOPY, PNICTIDES, SCATTERING, SPECTROSCOPY, SPRAY COATING, SURFACE COATING, TRANSITION ELEMENT COMPOUNDS
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