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Bugayev, Ye; Kondratenko, V.; Kopylets, I.; Zubaryev, Ye.
12. International conference on thin films (ICTF 12). Book of Abstract2002
12. International conference on thin films (ICTF 12). Book of Abstract2002
AbstractAbstract
[en] The structural quality of layers and interfaces in Co/C X-ray multilayers with period ∼2.3 nm deposited by magnetron sputtering onto different substrates (glass, silicon, fused quartz) has been studied by means of transmission electron microscopy, electron diffraction and small angle X-ray scattering (l=0.154 and 0.166 nm). The structure of cobalt and carbon layers in as-deposited state is amorphous. The smooth and continuous cobalt layers are formed at thickness over 1 nm. The interlayer roughness development in dependence of number of layers has been revealed by means of comparison of calculated and experimental reflectivity curves. (Authors)
Primary Subject
Source
Majkova, E. (ed.); Stefan Luby, S. (ed.) (Slovak Academy of Sciences, Bratislava (Slovakia)); Slovak Vacuum Society, Bratislava (Slovakia); Slovak Academy of Sciences, Bratislava (Slovakia); Slovak University of Technology, Bratislava (Slovakia); Czech Vacuum Society, Prague (Czech Republic); 182 p; Sep 2002; 1 p; 12. International conference on thin films; Bratislava (Slovakia); 15-20 Sep 2002; Also available from VEDA, Publishing House of Slovak Academy of Sciences, Bratislava, Slovak Republic; p. TF7.1.P
Record Type
Miscellaneous
Literature Type
Conference; Numerical Data
Report Number
Country of publication
AMORPHOUS STATE, CARBON, CHEMICAL VAPOR DEPOSITION, COBALT, ELECTRON DIFFRACTION, EXPERIMENTAL DATA, GLASS, INHOMOGENEOUS PLASMA, LAYERS, MAGNETRONS, NANOSTRUCTURES, QUARTZ, SCATTERING, SILICON, SOLIDS, SPUTTERING, THIN FILMS, TRANSMISSION ELECTRON MICROSCOPY, VAPOR DEPOSITED COATINGS, X-RAY SPECTROMETERS
CHEMICAL COATING, COATINGS, COHERENT SCATTERING, DATA, DEPOSITION, DIFFRACTION, ELECTRON MICROSCOPY, ELECTRON TUBES, ELECTRONIC EQUIPMENT, ELEMENTS, EQUIPMENT, FILMS, INFORMATION, MEASURING INSTRUMENTS, METALS, MICROSCOPY, MICROWAVE EQUIPMENT, MICROWAVE TUBES, MINERALS, NONMETALS, NUMERICAL DATA, OXIDE MINERALS, PLASMA, SCATTERING, SEMIMETALS, SPECTROMETERS, SURFACE COATING, TRANSITION ELEMENTS
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