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[en] Influences of 6.8 MeV protons and 27.2 MeV alpha-particles on optical properties of the surface of chemically polished Si monocrystals were studied. Optical parameters (refraction index n, absorption coefficient k and SiO2 film sickness d) were received by using polygonal monochromes ellipsometry method ((λ=632.8 nm). It has been shown that after proton irradiations with fluences 1015 and 1017 cm-2 optical constants of near surface layer, primordially imperfect due to the insufficient chemical etching after mechanical polish, were changed: n increased, while k decreased. During proton irradiation the oxide film thickness drops noticeably and 'dry etching' of Si surface is realized. The results testify about modification of the surface - its density grows and, accordingly, refraction index n too. If the surface is free from defects, than after irradiation its loosening occurs, accompanied by the n decrease. The mentioned effects in samples, irradiated by alpha-particles with fluences 2.7·1014 and 2.6·1016 cm-2, are insignificant, which indicate on the shock-free ionizing interaction of alpha-particles of given energy with the Si monocrystal surface. (authors)
Source
Anishchik, V.M. (ed.) (Belarusian state univ., Minsk (Belarus)); Belorusskij gosudarstvennyj universitet, Minsk (Belarus); Natsional'naya akademiya nauk Belarusi, Minsk (Belarus); Ministerstvo obrazovaniya Respubliki Belarus', Minsk (Belarus); Gosudarstvennyj komitet po nauke i tekhnologiyam, Minsk (Belarus); Belorusskij innovatsionnyj fond, Minsk (Belarus); Belorusskij respublikanskij fond fundamental'nykh issledovanij, Minsk (Belarus); Belorusskoe fizicheskoe obshchestvo, Minsk (Belarus); 412 p; ISBN 978-985-476-530-3; 
; Sep 2007; p. 30-31; 7. International conference 'Interaction of radiation with solids'; 7. Mezhdunarodnaya konferentsiya 'Vzaimodejstvie izluchenij s tverdym telom'; Minsk (Belarus); 26-28 Sep 2007; 3 refs., 1 tab., 2 figs.
; Sep 2007; p. 30-31; 7. International conference 'Interaction of radiation with solids'; 7. Mezhdunarodnaya konferentsiya 'Vzaimodejstvie izluchenij s tverdym telom'; Minsk (Belarus); 26-28 Sep 2007; 3 refs., 1 tab., 2 figs.