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[en] Vanadium oxide films were fabricated by two techniques-reactive deposition in oxygen-containing plasma and metal vanadium vacuum deposition with subsequent oxidation in air. It has been shown that the latter process allows formation of the films having reduced phase transition temperature ∼50 oS. The proposed capacitor design of sensitive element excludes electrical contacts to vanadium oxide, so the element is less crytical to degradation and current noise effects
Journal
Materials Science and Engineering. B, Solid-State Materials for Advanced Technology; ISSN 0921-5107; 
; CODEN MSBTEK; v. 141(3); p. 108-114
; CODEN MSBTEK; v. 141(3); p. 108-114