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AbstractAbstract
[en] Results obtained in a study of spectrometric characteristics of arrays of four detectors based on 4H-SiC ion-implantation-doped p+-n junctions in the temperature range 25-140 deg. C are reported for the first time. The junctions were fabricated by ion implantation of aluminum into epitaxial 4H-SiC layers of thickness ≤45 μm, grown by chemical vapor deposition with uncompensated donor concentration Nd - Na = (4-6) x 1014 cm-3. The structural features of the ion-implantation-doped p+-layers were studied by secondary-ion mass spectrometry, transmission electron microscopy, and Rutherford backscattering spectroscopy in the channeling mode. Parameters of the diode arrays were determined by testing in air with natural-decay alpha particles with an energy of 3.76 MeV. The previously obtained data for similar single detectors were experimentally confirmed: the basic characteristics of the detector arrays, the charge collection efficiency and energy resolution, are improved as the working temperature increases
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Copyright (c) 2008 Pleiades Publishing, Ltd.; Country of input: International Atomic Energy Agency (IAEA)
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Journal Article
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ALPHA PARTICLES, ALUMINIUM, CHEMICAL VAPOR DEPOSITION, DOPED MATERIALS, ENERGY RESOLUTION, EPITAXY, ION IMPLANTATION, MASS SPECTROSCOPY, MEV RANGE 01-10, RUTHERFORD BACKSCATTERING SPECTROSCOPY, SEMICONDUCTOR JUNCTIONS, SILICON CARBIDES, TEMPERATURE RANGE 0273-0400 K, TEMPERATURE RANGE 0400-1000 K, TRANSMISSION ELECTRON MICROSCOPY
CARBIDES, CARBON COMPOUNDS, CHARGED PARTICLES, CHEMICAL COATING, CRYSTAL GROWTH METHODS, DEPOSITION, ELECTRON MICROSCOPY, ELEMENTS, ENERGY RANGE, IONIZING RADIATIONS, MATERIALS, METALS, MEV RANGE, MICROSCOPY, RADIATIONS, RESOLUTION, SILICON COMPOUNDS, SPECTROSCOPY, SURFACE COATING, TEMPERATURE RANGE
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