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AbstractAbstract
[en] Pb(Zr0.52Ti0.48)O3 (PZT) thin films with large remanent polarization and SrBi2Ta2O9 (SBT) thin films with excellent fatigue-resisting characteristic have been widely studied for non-volatile random access memories, respectively. To combine these two advantages, bilayered Pb(Zr0.52Ti0.48)O3/SrBi2Ta2O9 (PZT/SBT) thin films were fabricated on Pt/TiO2/SiO2/Si substrates by chemical solution deposition method. X-ray diffraction patterns revealed that the diffraction peaks of PZT/SBT thin films were completely composed of PZT and SBT, and no other secondary phase was observed. The electrical properties of the bilayered structure PZT/SBT films have been investigated in comparison with pure PZT and SBT films. PZT/SBT bilayered thin films showed larger remanent polarization (2Pr) of 18.37 μC/cm2 than pure SBT and less polarization fatigue up to 1 x 109 switching cycles than pure PZT. These results indicated that this bilayered structure of PZT/SBT is a promising material combination for ferroelectric memory applications
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S0169-4332(07)01027-6; Available from http://dx.doi.org/10.1016/j.apsusc.2007.07.067; Copyright (c) 2007 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.; Country of input: International Atomic Energy Agency (IAEA)
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Journal Article
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ALKALINE EARTH METAL COMPOUNDS, CHALCOGENIDES, COHERENT SCATTERING, DEPOSITION, DIELECTRIC MATERIALS, DIFFRACTION, ELEMENTS, FILMS, LEAD COMPOUNDS, MATERIALS, MECHANICAL PROPERTIES, METALS, OXIDES, OXYGEN COMPOUNDS, PHYSICAL PROPERTIES, PLATINUM METALS, REFRACTORY METAL COMPOUNDS, SCATTERING, SEMIMETALS, SILICON COMPOUNDS, SURFACE COATING, TITANATES, TITANIUM COMPOUNDS, TRANSITION ELEMENT COMPOUNDS, TRANSITION ELEMENTS, ZIRCONATES, ZIRCONIUM COMPOUNDS
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