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Lethy, K.J.; Beena, D.; Vinod Kumar, R.; Mahadevan Pillai, V.P.; Ganesan, V.; Sathe, Vasant, E-mail: vpmpillai9@rediffmail.com2008
AbstractAbstract
[en] Thin films of tungsten trioxide (WO3) are prepared by reactive pulsed laser deposition (PLD) technique on glass substrates at three different substrate temperatures (Ts). The structural, morphological and optical properties of the deposited films are systematically studied using X-ray diffraction (XRD), grazing incidence X-ray diffraction (GIXRD), micro-Raman spectroscopy, scanning electron microscopy (SEM), atomic force microscopy (AFM) and UV-VIS spectrophotometry techniques. X-ray diffraction analysis reveals that crystalline WO3 films can grow effectively even at 300 K at an oxygen pressure of 0.12 mbar. All the films deposited at various Ts exhibit mixed oxide phase consisting of orthorhombic and triclinic phase of tungsten oxide with a preferred orientation along (0 0 1) lattice plane reflection. Micro-Raman results are consistent with X-ray diffraction findings. The SEM analysis shows that deposited films are porous and crystalline grains are of nano-metric dimension. The effect of Ts on mean surface roughness studied by AFM analysis reveals that mean surface roughness decreases with increase in Ts. The optical response of WO3 layers measured using UV-VIS spectrophotometry is used to extract the optical constants such as refractive index (n), extinction coefficient (k) and optical band gap (Eg), following the method of Swanepoel
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S0169-4332(07)01337-2; Available from http://dx.doi.org/10.1016/j.apsusc.2007.09.068; Copyright (c) 2007 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.; Country of input: International Atomic Energy Agency (IAEA)
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Journal Article
Journal
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ATOMIC FORCE MICROSCOPY, ENERGY BEAM DEPOSITION, GRAIN ORIENTATION, LASER RADIATION, ORTHORHOMBIC LATTICES, POROUS MATERIALS, PULSED IRRADIATION, RAMAN SPECTRA, RAMAN SPECTROSCOPY, REFRACTIVE INDEX, SCANNING ELECTRON MICROSCOPY, SPECTROPHOTOMETRY, THIN FILMS, TRICLINIC LATTICES, TUNGSTEN OXIDES, X-RAY DIFFRACTION
CHALCOGENIDES, COHERENT SCATTERING, CRYSTAL LATTICES, CRYSTAL STRUCTURE, DEPOSITION, DIFFRACTION, ELECTROMAGNETIC RADIATION, ELECTRON MICROSCOPY, FILMS, IRRADIATION, LASER SPECTROSCOPY, MATERIALS, MICROSCOPY, MICROSTRUCTURE, OPTICAL PROPERTIES, ORIENTATION, OXIDES, OXYGEN COMPOUNDS, PHYSICAL PROPERTIES, RADIATIONS, REFRACTORY METAL COMPOUNDS, SCATTERING, SPECTRA, SPECTROSCOPY, SURFACE COATING, TRANSITION ELEMENT COMPOUNDS, TUNGSTEN COMPOUNDS
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