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Wei Rongshan; Deng Ning; Dong Hao; Ren Min; Zhang Lei; Chen Peiyi; Liu Litian, E-mail: wrs99@mails.thu.edu.cn2008
AbstractAbstract
[en] A Si/SiGe HBT-type phototransistor with 10 Ge-dot layers (8ML in each layer, separated by 30 nm Si spacer) incorporated in the base-collector junction was grown by UHV-CVD. To achieve low dark current density and high photo-responsivity, a high-low emitter profile consisting of a heavily doped polysilicon contact on top of a thin epitaxial emitter cap has been fabricated. At room temperature, I-V measurement showed a low dark current density of 3 x 10-5 A/cm2 at 3 V. The measured breakdown voltage BVceo was about 12 V. A photo-responsivity of 1.94 and 0.028 mA/W was achieved at 1.31 and 1.55 μm for normal incidence, respectively. Compared to a p-i-n reference detector with the same quantum-dot layer, the responsivity is improved by a factor of 45 and 20 at 1.31 and 1.55 μm, respectively
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Source
E-MRS 2007: Symposium B on Semiconductor nanostructures towards electronic and optoelectronic device applications; Strasbourg (France); 28 May - 1 Jun 2007; S0921-5107(07)00442-4; Available from http://dx.doi.org/10.1016/j.mseb.2007.08.005; Copyright (c) 2007 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.; Country of input: International Atomic Energy Agency (IAEA)
Record Type
Journal Article
Literature Type
Conference
Journal
Materials Science and Engineering. B, Solid-State Materials for Advanced Technology; ISSN 0921-5107;
; CODEN MSBTEK; v. 147(2-3); p. 187-190

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