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Stenger, I.; Nguyen-Tran, Th.; Abramov, A.; Barthou, C.; Roca i Cabarrocas, P., E-mail: ingrid.stenger@polytechnique.edu2008
AbstractAbstract
[en] Polymorphous silicon carbon (pm-SiC:H) thin films have been prepared from the decomposition of SiH4-CH4-H2 mixtures at low temperature (200 deg. C) by plasma-enhanced chemical vapour deposition (PECVD). The optical and microstructural properties of the films were studied by spectroscopic ellipsometry and Raman spectroscopy. The SiH4/CH4 flow rate ratio is demonstrated as a key deposition parameter for optimizing the electroluminescence of PIN diodes incorporating this material for the intrinsic (I) layer. Diodes with rectification ratios above 106 were realized by using the optimized materials. Electroluminescence spectra, centred at 1.4 eV, were obtained by applying a DC voltage lower than 4 V, which make these devices interesting for optoelectronic applications
Secondary Subject
Source
E-MRS 2007: Symposium B on Semiconductor nanostructures towards electronic and optoelectronic device applications; Strasbourg (France); 28 May - 1 Jun 2007; S0921-5107(07)00443-6; Available from http://dx.doi.org/10.1016/j.mseb.2007.08.003; Copyright (c) 2007 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.; Country of input: International Atomic Energy Agency (IAEA)
Record Type
Journal Article
Literature Type
Conference
Journal
Materials Science and Engineering. B, Solid-State Materials for Advanced Technology; ISSN 0921-5107;
; CODEN MSBTEK; v. 147(2-3); p. 245-248

Country of publication
ALKANES, CHEMICAL COATING, CHEMICAL REACTIONS, DEPOSITION, DISPERSIONS, ELEMENTS, EMISSION, ENERGY RANGE, EV RANGE, FILMS, HYDRIDES, HYDROCARBONS, HYDROGEN COMPOUNDS, LASER SPECTROSCOPY, LUMINESCENCE, MEASURING METHODS, NONMETALS, ORGANIC COMPOUNDS, ORGANIC SILICON COMPOUNDS, PHOTON EMISSION, SEMIMETALS, SILICON COMPOUNDS, SPECTROSCOPY, SURFACE COATING, TEMPERATURE RANGE
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