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Chang, S-J; Hsueh, T-J; Hsu, C-L; Lin, Y-R; Chen, I-C; Huang, B-R, E-mail: changsj@mail.ncku.edu.tw2008
AbstractAbstract
[en] In this study, we report the growth and characterization of lateral ZnO nanowires (NWs) on ZnO:Ga/glass templates. Using x-ray diffraction and micro-Raman spectroscopy, it was found that crystal quality of the as-grown ZnO NWs is good. It was also found that the average length and average diameter of the laterally grown ZnO NWs were 5 μm and 30 nm, respectively. A vacuum pressure sensor was then fabricated using a single NW bridging across two electrodes. By measuring the current-voltage characteristics of the samples at low pressure, we found that the currents were of 17, 34.28, 57.37 and 96.06 nA for the ZnO NW measured at 1 x 10-3 Torr, 1 x 10-4 Torr, 3 x 10-5 Torr and 5 x 10-6 Torr, respectively. These values suggest that the laterally grown ZnO NWs prepared in this study are potentially useful for vacuum pressure sensing
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Source
S0957-4484(08)65374-X; Available from http://dx.doi.org/10.1088/0957-4484/19/9/095505; Country of input: International Atomic Energy Agency (IAEA)
Record Type
Journal Article
Journal
Nanotechnology (Print); ISSN 0957-4484;
; v. 19(9); [4 p.]

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