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AbstractAbstract
[en] Synthesis of photoluminescent (PL) Si thin films is explored using an intense pulsed ion-beam evaporation (IBE) technique. The deposition of Si was performed at a vacuum condition of ∼10-2 Pa in a simple scheme. Well-crystallized Si thin films have been obtained as revealed by high-resolution transmission electron microscopy (HRTEM) and X-ray diffraction (XRD). Visible light emission in blue-green range was observed from the samples under excitation of a 325 nm He-Cd laser (3.8 eV) at room temperature. The thin films were composed of relatively large crystals with an average size around 20 nm, above the range predicted using a quantum confinement model proposed for Si nanocrystals. The PL was subsequently studied with a hydrofluoric acid (HF) erosion test, intended to diminish the effect of Si oxides on the samples, where no PL shift was found except for deterioration in PL intensity after the post-treatment of samples. Furthermore, the experimental PL spectra can be consistently deconvolved into four subbands with centers at 2.88, 2.75, 2.55, and 2.36 eV. All the PL subbands are ascribed to Si oxide-defect bands irrelevant to the quantum confinement model
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Source
S0921-5107(08)00014-7; Available from http://dx.doi.org/10.1016/j.mseb.2008.01.001; Copyright (c) 2008 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.; Country of input: International Atomic Energy Agency (IAEA)
Record Type
Journal Article
Journal
Materials Science and Engineering. B, Solid-State Materials for Advanced Technology; ISSN 0921-5107;
; CODEN MSBTEK; v. 149(1); p. 105-110

Country of publication
BEAMS, CHALCOGENIDES, COHERENT SCATTERING, DIFFRACTION, ELECTROMAGNETIC RADIATION, ELECTRON MICROSCOPY, ELEMENTS, EMISSION, ENERGY RANGE, ENERGY-LEVEL TRANSITIONS, EV RANGE, FILMS, FLUORINE COMPOUNDS, HALOGEN COMPOUNDS, HYDROGEN COMPOUNDS, INORGANIC ACIDS, INORGANIC COMPOUNDS, LUMINESCENCE, MICROSCOPY, OXIDES, OXYGEN COMPOUNDS, PHASE TRANSFORMATIONS, PHOTON EMISSION, RADIATIONS, SCATTERING, SEMIMETALS, SILICON COMPOUNDS, TEMPERATURE RANGE
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