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AbstractAbstract
[en] A number of progressive technical solutions are used in the 'Bulat-9' machine designed for vacuum arc coating deposition. The features of the machine are: a dome shaped working chamber that allows to 'wash' its inner surfaces with hot nitrogen or argon gas; a system of automatic loading/unloading of articles to be treated into the chamber through its bottom; shielding of the inner surfaces of the chamber by heated panels; improved vacuum arc plasma sources including filtered one; four ported power supply for the vacuum arc discharges; LC oscillatory circuits suppressing microarcs on the substrate; the system of automatic control of a working process. The said technical features cause the apparatus originality and novelty preserved up to-day
Original Title
Vysokoproizvoditel'naya vakuumno-dugovaya ustanovka dlya osazhdeniya pokrytij
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Record Type
Journal Article
Journal
Voprosy Atomnoj Nauki i Tekhniki; ISSN 1562-6016;
; v. 2(92); p. 108-118

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