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[en] Helicon hydrogen/helium/argon plasma generators for ion injectors, ICP-MS, ICP-AES have been developed. The compact magnetic system is applied to creation of a longitudinal magnetic field in plasma generators with constant magnets (NdFeB) and the ring form ferrite. Following parameters of generators are received: plasma density of 1011...9·1012 cm-3, pressure of 10...100 mTorr, and RF power input into the plasma < 350 W (fRF=27.12 MHz)
Journal
Voprosy Atomnoj Nauki i Tekhniki; ISSN 1562-6016; 
; v. 4(6); p. 147-149
; v. 4(6); p. 147-149