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[en] Optimization principles for geometric and physical parameters of probe forming system of nuclear microprobe were considered. Current value of beam which can be focused on the defined target spot was chosen as a criterion of optimum. The optimizing calculation results were compared with experimental data obtained by detecting of the secondary electron emission when the calibrated copper grid was being scanned by the beam
Journal
Voprosy Atomnoj Nauki i Tekhniki; ISSN 1562-6016; 
; v. 4(6); p. 269-273
; v. 4(6); p. 269-273