Filters
Results 1 - 1 of 1
Results 1 - 1 of 1.
Search took: 0.011 seconds
AbstractAbstract
[en] The electron energy distribution function (EEDF) and plasma parameters in a planar dc magnetron sputtering discharge in argon and krypton were determined using a Langmuir probe. Two groups of electrons are observed in the discharge. The electron temperature of the cold electrons is roughly independent of the discharge pressure, while the electron temperature of the hot electrons decreases with increased discharge pressure. The electron density increases with increased pressure and is roughly a factor of 2-3 higher for a krypton discharge than for an argon discharge
Primary Subject
Source
IVC-17: 17. international vacuum congress; Stockholm (Sweden); 2-6 Jul 2007; ICSS-13: 13. international conference on surface science; Stockholm (Sweden); 2-6 Jul 2007; ICN+T 2007: International conference on nanoscience and technology; Stockholm (Sweden); 2-6 Jul 2007; Available from http://dx.doi.org/10.1088/1742-6596/100/6/062018; Country of input: International Atomic Energy Agency (IAEA)
Record Type
Journal Article
Literature Type
Conference
Journal
Journal of Physics. Conference Series (Online); ISSN 1742-6596;
; v. 100(6); [4 p.]

Country of publication
Reference NumberReference Number
INIS VolumeINIS Volume
INIS IssueINIS Issue